I've done it many time without any issues. In fact it's done everytime the car is washed. I've used both high and low pressure. If you take precautions with silicone spray and dielectric grease you're not going to have a problem. Keeping the engine bay clean is paramount to good maintenance and being able to spot oil or fluid leaks.
My suggestion is not to get close with the wand but simply soap it down and rinse at a reasonable distance.
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